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Article Dans Une Revue Review of Scientific Instruments Année : 2010

Thermal exchange radius measurement: Application to nanowire thermal imaging

Résumé

In scanning thermal microscopy (SThM) techniques, the thermal exchange radius between tip and sample is a crucial parameter. Indeed, it limits the lateral spatial resolution but, in addition, an accurate value of this parameter is necessary for a precise identification of thermal properties. But until now, the thermal exchange radius is usually estimated but not measured. This paper presents an experimental procedure, based on the 3ω-SThM method, to measure its value. We apply this procedure to evaluate the thermal exchange radius of two commercial probes: the well-known Wollaston one and a new probe constituted of a palladium film on a SiO2 substrate. Finally, presenting silicon nanowire images, we clearly demonstrate that this new probe can reach a spatial resolution better than 100 nm whereas the Wollaston probe hardly reaches a submicronic spatial resolution.

Dates et versions

hal-00505488 , version 1 (23-07-2010)

Identifiants

Citer

Etienne Puyoo, Stéphane Grauby, Jean-Michel Rampnoux, Emmanuelle Rouvière, Stefan Dilhaire. Thermal exchange radius measurement: Application to nanowire thermal imaging. Review of Scientific Instruments, 2010, 81 (7), pp.073701 (1-5). ⟨10.1063/1.3455214⟩. ⟨hal-00505488⟩

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