Electrical properties and interfacial characteristics of RuO2/HfAlOx/SiON/Si and RuO2/LaAlO3/SiON/Si capacitors - Archive ouverte HAL
Article Dans Une Revue Journal of The Electrochemical Society Année : 2008

Dates et versions

hal-00492044 , version 1 (14-06-2010)

Identifiants

Citer

V. Edon, Zhenyu Li, M.C. Hugon, C. Krug, K.P. Bastos, et al.. Electrical properties and interfacial characteristics of RuO2/HfAlOx/SiON/Si and RuO2/LaAlO3/SiON/Si capacitors. Journal of The Electrochemical Society, 2008, 155 (9), pp.H661. ⟨10.1149/1.2952529⟩. ⟨hal-00492044⟩
67 Consultations
0 Téléchargements

Altmetric

Partager

More