<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00476051</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-13T03:32:12+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Development of dark Ti(C,O,N) coatings prepared by reactive sputtering.</title>
            <author role="aut">
              <persName>
                <forename type="first">J.M.</forename>
                <surname>Chappé</surname>
              </persName>
              <idno type="halauthorid">453973-0</idno>
              <affiliation ref="#struct-300854"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Vaz</surname>
              </persName>
              <idno type="halauthorid">188892-0</idno>
              <affiliation ref="#struct-300854"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">L.</forename>
                <surname>Cunha</surname>
              </persName>
              <idno type="halauthorid">350539-0</idno>
              <affiliation ref="#struct-300854"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Moura</surname>
              </persName>
              <idno type="halauthorid">337143-0</idno>
              <affiliation ref="#struct-300854"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">M.C.</forename>
                <surname>Marco de Lucas</surname>
              </persName>
              <email type="md5">b589d4331e654a498c991b7119523a31</email>
              <email type="domain">u-bourgogne.fr</email>
              <idno type="idhal" notation="string">maria-carmen-marco-de-lucas</idno>
              <idno type="idhal" notation="numeric">752669</idno>
              <idno type="halauthorid" notation="string">331131-752669</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5135-4026</idno>
              <idno type="IDREF">https://www.idref.fr/069128987</idno>
              <idno type="GOOGLE SCHOLAR">zF9CNdsAAAAJ</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/N-7082-2019</idno>
              <idno type="VIAF">https://viaf.org/viaf/203098159</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/N-7082-2019</idno>
              <affiliation ref="#struct-103192"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">L.</forename>
                <surname>Imhoff</surname>
              </persName>
              <email type="md5">11202b1fecfee168d0369c0a531c3fc2</email>
              <email type="domain">u-bourgogne.fr</email>
              <idno type="idhal" notation="string">luc-imhoff</idno>
              <idno type="idhal" notation="numeric">833634</idno>
              <idno type="halauthorid" notation="string">146217-833634</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-1115-5342</idno>
              <affiliation ref="#struct-103192"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Bourgeois</surname>
              </persName>
              <idno type="halauthorid">104179-0</idno>
              <affiliation ref="#struct-103192"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.F.</forename>
                <surname>Pierson</surname>
              </persName>
              <email type="md5">153234a36cf808400db9734f278e6edf</email>
              <email type="domain">univ-lorraine.fr</email>
              <idno type="idhal" notation="string">jean-francois-pierson</idno>
              <idno type="idhal" notation="numeric">172352</idno>
              <idno type="halauthorid" notation="string">172010-172352</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8790-3162</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=3xMT4JMAAAAJ&amp;hl=fr</idno>
              <idno type="IDREF">https://www.idref.fr/135449499</idno>
              <affiliation ref="#struct-1115"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Agnès</forename>
                <surname>Birot</surname>
              </persName>
              <email type="md5">e183cf8cb9365aec1d395d87f2638260</email>
              <email type="domain">u-bourgogne.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2010-04-23 15:23:51</date>
              <date type="whenModified">2025-03-31 08:12:05</date>
              <date type="whenReleased">2010-04-23 15:23:51</date>
              <date type="whenProduced">2008</date>
              <ref type="externalLink" target="https://hdl.handle.net/1822/13840"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="103726">
                <persName>
                  <forename>Agnès</forename>
                  <surname>Birot</surname>
                </persName>
                <email type="md5">e183cf8cb9365aec1d395d87f2638260</email>
                <email type="domain">u-bourgogne.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00476051</idno>
            <idno type="halUri">https://hal.science/hal-00476051</idno>
            <idno type="halBibtex">chappe:hal-00476051</idno>
            <idno type="halRefHtml">&lt;i&gt;Surface and Coatings Technology&lt;/i&gt;, 2008, 203, pp.804-807. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.surfcoat.2008.05.039"&gt;&amp;#x27E8;10.1016/j.surfcoat.2008.05.039&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Surface and Coatings Technology, 2008, 203, pp.804-807. &amp;#x27E8;10.1016/j.surfcoat.2008.05.039&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-BOURGOGNE">Université Bourgogne Europe</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INPL">Institut National Polytechnique de Lorraine</idno>
            <idno type="stamp" n="ICB" corresp="UNIV-BOURGOGNE">Laboratoire Interdisciplinaire Carnot de Bourgogne</idno>
            <idno type="stamp" n="ICB-NANO-SIOM" corresp="ICB">ICB-NANO-SIOM</idno>
            <idno type="stamp" n="UNIV-LORRAINE">Université de Lorraine</idno>
            <idno type="stamp" n="IJL-UL">Institut Jean Lamour</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Development of dark Ti(C,O,N) coatings prepared by reactive sputtering.</title>
                <author role="aut">
                  <persName>
                    <forename type="first">J.M.</forename>
                    <surname>Chappé</surname>
                  </persName>
                  <idno type="halauthorid">453973-0</idno>
                  <affiliation ref="#struct-300854"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Vaz</surname>
                  </persName>
                  <idno type="halauthorid">188892-0</idno>
                  <affiliation ref="#struct-300854"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">L.</forename>
                    <surname>Cunha</surname>
                  </persName>
                  <idno type="halauthorid">350539-0</idno>
                  <affiliation ref="#struct-300854"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Moura</surname>
                  </persName>
                  <idno type="halauthorid">337143-0</idno>
                  <affiliation ref="#struct-300854"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">M.C.</forename>
                    <surname>Marco de Lucas</surname>
                  </persName>
                  <email type="md5">b589d4331e654a498c991b7119523a31</email>
                  <email type="domain">u-bourgogne.fr</email>
                  <idno type="idhal" notation="string">maria-carmen-marco-de-lucas</idno>
                  <idno type="idhal" notation="numeric">752669</idno>
                  <idno type="halauthorid" notation="string">331131-752669</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5135-4026</idno>
                  <idno type="IDREF">https://www.idref.fr/069128987</idno>
                  <idno type="GOOGLE SCHOLAR">zF9CNdsAAAAJ</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/N-7082-2019</idno>
                  <idno type="VIAF">https://viaf.org/viaf/203098159</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/N-7082-2019</idno>
                  <affiliation ref="#struct-103192"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">L.</forename>
                    <surname>Imhoff</surname>
                  </persName>
                  <email type="md5">11202b1fecfee168d0369c0a531c3fc2</email>
                  <email type="domain">u-bourgogne.fr</email>
                  <idno type="idhal" notation="string">luc-imhoff</idno>
                  <idno type="idhal" notation="numeric">833634</idno>
                  <idno type="halauthorid" notation="string">146217-833634</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-1115-5342</idno>
                  <affiliation ref="#struct-103192"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Bourgeois</surname>
                  </persName>
                  <idno type="halauthorid">104179-0</idno>
                  <affiliation ref="#struct-103192"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.F.</forename>
                    <surname>Pierson</surname>
                  </persName>
                  <email type="md5">153234a36cf808400db9734f278e6edf</email>
                  <email type="domain">univ-lorraine.fr</email>
                  <idno type="idhal" notation="string">jean-francois-pierson</idno>
                  <idno type="idhal" notation="numeric">172352</idno>
                  <idno type="halauthorid" notation="string">172010-172352</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8790-3162</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=3xMT4JMAAAAJ&amp;hl=fr</idno>
                  <idno type="IDREF">https://www.idref.fr/135449499</idno>
                  <affiliation ref="#struct-1115"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">19237</idno>
                <idno type="issn">0257-8972</idno>
                <idno type="eissn">1879-3347</idno>
                <title level="j">Surface and Coatings Technology</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">203</biblScope>
                  <biblScope unit="pp">804-807</biblScope>
                  <date type="datePub">2008</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.surfcoat.2008.05.039</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="ro">Reactive sputtering</term>
                <term xml:lang="ro">Titanium oxycarbonitride</term>
                <term xml:lang="ro">Structure</term>
                <term xml:lang="ro">Decorative properties</term>
              </keywords>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Direct current reactive magnetron sputtering was implemented to successfully deposit dark Ti(C,O,N) thin films on silicon substrates. A titanium target was sputtered while a mixture of oxygen and nitrogen was injected into the deposition chamber, independently from an acetylene source. The deposition parameters were chosen as a function of pre-existing knowledge about sputtered Ti–O–N and Ti–C–O films. Tuning the oxygen/(nitrogen+carbon) ratio allowed obtaining a large spectrum of properties. In particular, the colour of the films was characterized by spectral reflectance spectroscopy, and expressed in the CIE 1976 L⁎a⁎b⁎ colour space. An accurate control of the reactive gas mixture flow rate allowed obtaining intrinsic, stable and attractive dark colour for decorative applications. Surprisingly, the coatings with the lowest content of carbon and the highest content of oxygen presented the darkest tones. Composition analysis by electron probe microanalysis was done to quantify the titanium and metalloid concentrations in the films. X-ray diffraction experiments revealed the evolution of the film structure from an fcc structure for the lowest (O2+N2) flow rates to an amorphous one for the highest flow rates.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-300854" status="VALID">
          <orgName>Universidade do Minho = University of Minho  [Braga]</orgName>
          <date type="start">2016-11-23</date>
          <desc>
            <address>
              <addrLine>Largo do Paço, 4704-553 Braga</addrLine>
              <country key="PT"/>
            </address>
            <ref type="url">https://www.uminho.pt</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-103192" status="OLD">
          <idno type="IdRef">161048978</idno>
          <idno type="RNSR">201220440V</idno>
          <orgName>Laboratoire Interdisciplinaire Carnot de Bourgogne</orgName>
          <orgName type="acronym">ICB</orgName>
          <date type="start">2007-01-01</date>
          <date type="end">2016-12-31</date>
          <desc>
            <address>
              <addrLine>Université de Bourgogne - 9 avenue Alain Savary - BP 47870 - 21078 Dijon Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://icb.u-bourgogne.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300270" type="direct"/>
            <relation name="UMR6303 / UMR5209" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1115" status="OLD">
          <orgName>Laboratoire de science et génie des surfaces</orgName>
          <orgName type="acronym">LSGS</orgName>
          <date type="start">1990-01-01</date>
          <date type="end">2008-12-31</date>
          <desc>
            <address>
              <addrLine>Parc de Saurupt 54042 NANCY CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.mines.u-nancy.fr/~www/Presentation/lsgs/LSGS_1.html</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300293" type="direct"/>
            <relation name="UMR7570 / URA1402" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300270" status="OLD">
          <idno type="IdRef">02819005X</idno>
          <idno type="ISNI">0000000122989313</idno>
          <idno type="ROR">https://ror.org/03k1bsr36</idno>
          <orgName>Université de Bourgogne</orgName>
          <orgName type="acronym">UB</orgName>
          <date type="end">2024-12-31</date>
          <desc>
            <address>
              <addrLine>Maison de l'université - Esplanade Érasme - BP 27877 - 21078 Dijon cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.u-bourgogne.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300293" status="OLD">
          <orgName>Institut National Polytechnique de Lorraine</orgName>
          <orgName type="acronym">INPL</orgName>
          <date type="end">2011-12-31</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>