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Communication Dans Un Congrès Année : 2009

Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications

Résumé

We present a theoretical calculation and experimental results for an isolated acoustic wave. The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AIN/ZnO/diamond structure was investigated by theoretical calculations. It was found that the AlN thickness must he at least more than 3 lambda/2 to obtain a negligible surface displacement. In the same way the ZnO thickness for a fixed value of AlN at 2 lambda must be higher than lambda/4 to confine the acoustic wave. The coupling of the wave presents an optimum around lambda 2 for the ZnO layer thichness.
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Dates et versions

hal-00475893 , version 1 (23-04-2010)

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  • HAL Id : hal-00475893 , version 1

Citer

L. Le Brizoual, O. Elmazria, S. Zghoon, A. Soussou, F. Sarry, et al.. Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications. Joint Meeting of the 23rd European Frequency and Time Forum/IEEE International Frequency Control Symposium, Apr 2009, Besancon, France. pp.305. ⟨hal-00475893⟩
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