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Communication Dans Un Congrès Année : 2009

AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

V. Mortet
  • Fonction : Auteur
A. Soltani
Abdelkrim Talbi
P. Pobedinskas
  • Fonction : Auteur
K. Haenen
  • Fonction : Auteur
Philippe Pernod
P. Wagner
  • Fonction : Auteur

Résumé

Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.
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Origine : Publication financée par une institution
Licence : CC BY NC ND - Paternité - Pas d'utilisation commerciale - Pas de modification

Dates et versions

hal-00474464 , version 1 (26-08-2022)

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Paternité - Pas d'utilisation commerciale - Pas de modification

Identifiants

Citer

V. Mortet, A. Soltani, Abdelkrim Talbi, P. Pobedinskas, K. Haenen, et al.. AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators. Eurosensors XXIII, Sep 2009, Lausanne, Switzerland. pp.40-43, ⟨10.1016/j.proche.2009.07.010⟩. ⟨hal-00474464⟩
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