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Communication Dans Un Congrès Année : 2009

Tip-matter interaction measurements using MEMS ring resonators

Résumé

We have previously reported on a new concept of Atomic Force Microscope (AFM) probes using bulk-mode silicon resonators [1]. We report here measurements of interaction between a surface and the vibrating tip of the resonator. In particular, the tip oscillation amplitude versus the probe-sample distance has been acquired for various surface materials. These experiments give access to the electrical response of the resonator regarding the tip-surface interaction and represent a first step towards force spectroscopy using MEMS resonators based probes. This work paves the way to the integration of such probes in an AFM set-up using the resonator output signal as the AFM feedback control signal.
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Dates et versions

hal-00474451 , version 1 (20-04-2010)

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Emmanuelle Algre, Bernard Legrand, Marc Faucher, Benjamin Walter, Lionel Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩. ⟨hal-00474451⟩
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