Elaboration and test of high energy density magnetic micro-actuators for tactile display applications
Résumé
This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions.
The magnetic micro-actuators include an elastomeric PDMS diaphragm that holds a samarium-cobalt micro-magnet and a miniature Copper coil. The device was first optimized using finite element analysis for different coil-magnet configurations. Magnetic micro-actuators were micro-fabricated and their performances were experimentally evaluated. Each micro-actuator provides forces around 4mN for 800mA RMS driving currents (power dissipation about 100mW).
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