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Communication Dans Un Congrès Année : 2009

Elaboration and test of high energy density magnetic micro-actuators for tactile display applications

J. Streque
  • Fonction : Auteur
Abdelkrim Talbi
R. Viard
  • Fonction : Auteur
Philippe Pernod

Résumé

This study reports the elaboration and characterization of a 4x4 MEMS elastomeric membrane array with 2 mm resolution, driven by magnetic micro-actuation. The device is to be used for tactile display interfaces providing sensations to the skin in Human-Computer Interactions. The magnetic micro-actuators include an elastomeric PDMS diaphragm that holds a samarium-cobalt micro-magnet and a miniature Copper coil. The device was first optimized using finite element analysis for different coil-magnet configurations. Magnetic micro-actuators were micro-fabricated and their performances were experimentally evaluated. Each micro-actuator provides forces around 4mN for 800mA RMS driving currents (power dissipation about 100mW).
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Origine : Publication financée par une institution
Licence : CC BY NC ND - Paternité - Pas d'utilisation commerciale - Pas de modification

Dates et versions

hal-00474088 , version 1 (26-08-2022)

Identifiants

Citer

J. Streque, Abdelkrim Talbi, R. Viard, Philippe Pernod, Vladimir Preobrazhensky. Elaboration and test of high energy density magnetic micro-actuators for tactile display applications. Eurosensors XXIII, Sep 2009, Lausanne, Switzerland. pp.694-697, ⟨10.1016/j.proche.2009.07.173⟩. ⟨hal-00474088⟩
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