SU-8-based nanocomposites for acoustical matching layer - Archive ouverte HAL
Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2009

SU-8-based nanocomposites for acoustical matching layer

S. Wang
  • Fonction : Auteur
Dorothée Debavelaere-Callens
Bertrand Nongaillard
Assane Ndieguene
  • Fonction : Auteur
  • PersonId : 885450
Georges Nassar
Caroline Soyer
X. Zhao

Résumé

SU-8, an epoxy-based photoresist, was introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. Acoustical performances, including the acoustic longitudinal wave velocity and attenuation of the SU-8-based matching layer, were characterized at a frequency of 1 GHz at room temperature. The gain in echo characterization with a SU-8/SiO 2 bilayer and with different nanocomposite monolayers made of SU-8 and TiO 2 nanoparticles (size around 35 nm) between silicon and water was characterized as being above 10 dB in each case. With the increase of concentration of TiO 2 in SU-8 based composites from 0 to 30 wt%, acoustical impedance of the nanocomposites increased from about 3 to 6 MRayls, respectively. The acoustical attenuation in the nanocomposites is between 0.5 and 0.6 dB/μm. The most efficient matching was obtained with the nanocomposite integrating 30 wt% TiO 2 nanoparticles, with which the enhanced loss is about 0.34 dB as the attenuation is about 0.5 dB/μm. This type of matching layer has potential applications in lab-on-chip technology for high frequency transducers or in the fabrication of high frequency piezocomposites.
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Dates et versions

hal-00473731 , version 1 (16-04-2010)

Identifiants

Citer

S. Wang, Pierre Campistron, Julien Carlier, Dorothée Debavelaere-Callens, Bertrand Nongaillard, et al.. SU-8-based nanocomposites for acoustical matching layer. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2009, 56, pp.1483-1489. ⟨10.1109/TUFFC.2009.1204⟩. ⟨hal-00473731⟩
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