Automatic extraction methodology for accurate measurement of effective channel length on 65nm MOSFET technology and Below
Résumé
The length of MOSFET channels is an important circuit design parameter, and this paper focuses on a new industrially-compatible technique using gate-to-channel measurements Cgc(Vg) to provide accurate extraction of the channel length. Thanks to fully-automatic probers, the technique provides large scale extractions and so, statistical-based results can be extracted with a maximized reliability. An in-depth study of parasitic capacitances has been performed to improve the extraction accuracy to within a few nanometers.