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Article Dans Une Revue Journal of Non-Crystalline Solids Année : 2001

FTIR phase-modulated ellipsometry measurements of microcrystalline silicon films deposited by hot-wire CVD

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hal-00458760 , version 1 (22-02-2010)

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  • HAL Id : hal-00458760 , version 1

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Enric Garcia-Caurel, Chisato Niikura, S.Y. Kim, Bernard Drevillon, Jean-Eric Bourée. FTIR phase-modulated ellipsometry measurements of microcrystalline silicon films deposited by hot-wire CVD. Journal of Non-Crystalline Solids, 2001, 299-302, pp.215. ⟨hal-00458760⟩
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