Morphology study of femtosecond laser nano-structured borosilicate glass using atomic force microscopy and scanning electron microscopy
Résumé
The morphology of nano-craters drilled in borosilicate glass by single-shot femtosecond laser ablation has been studied by atomic force microscopy and scanning electron microscopy. The influence of polarization, numerical aperture (NA=0.4 and 0.8) and fluence (3oFo18Jcm ?2 ) was systematically investigated in the case of a strong geometrical confinement, leading to nanometric scale in all spatial dimensions. Indeed, the structure size is not restricted by the diffraction limit but determined by the laser pulse stability and the material properties. The dimensions of the principal and of the secondary (self-focusing) craters, and of the rim have been studied in detail. Different relationships have been proposed for the evolutions of the depths and of the different diameters of the craters as functions of the position of the specimen surface through the beam–material interaction region, and of the characteristics of the laser.
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