Modeling and performance of uncoated microcantilever-based chemical sensors - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Sensors and Actuators B: Chemical Année : 2010

Modeling and performance of uncoated microcantilever-based chemical sensors

Résumé

Chemical sensors based on vibrating silicon microcantilevers without sensitive coating are investigated herein. The sensor signal is the relative variation of the microcantilever resonant frequency which depends on both the viscosity and the density of the fluid surrounding the microcantilever. This principle has been applied to the detection of binary gas mixtures. Experimental data for He/N2 and CO2/N2 environments are presented and compared to results of theoretical modeling. The advantages of such a gas sensor based on changes of physical properties are discussed (response time, sensitivity, selectivity, stability).
Fichier principal
Vignette du fichier
Preprint-Sens_Act_B_Uncoated.pdf (168.62 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-00453482 , version 1 (13-11-2014)

Identifiants

Citer

Sébastien Tétin, Benjamin Caillard, Francis Ménil, Hélène Debéda, Claude Lucat, et al.. Modeling and performance of uncoated microcantilever-based chemical sensors. Sensors and Actuators B: Chemical, 2010, 143, pp.555-560. ⟨10.1016/j.snb.2009.09.062⟩. ⟨hal-00453482⟩
148 Consultations
185 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More