<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00444370</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-27T23:21:20+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">STiGer cryoetching process of silicon: passivation mechanisms, enhanced robustness and performances</title>
            <author role="aut">
              <persName>
                <forename type="first">Jeremy</forename>
                <surname>Pereira</surname>
              </persName>
              <email type="md5">11a8627971c547661ee16c22dfc4c321</email>
              <email type="domain">univ-orleans.fr</email>
              <idno type="idhal" notation="numeric">858541</idno>
              <idno type="halauthorid" notation="string">381804-858541</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Hao</forename>
                <surname>Jiang</surname>
              </persName>
              <email type="md5">cd597f47b7ad2106cd2532b63a6741f7</email>
              <email type="domain">mines-paristech.fr</email>
              <idno type="idhal" notation="string">iris-jianghao</idno>
              <idno type="idhal" notation="numeric">20849</idno>
              <idno type="halauthorid" notation="string">9877-20849</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Laurianne</forename>
                <forename type="middle">E.</forename>
                <surname>Pichon</surname>
              </persName>
              <email type="md5">4cdbdbf35d1239a7ecfe9c5afe30b95a</email>
              <email type="domain">univ-orleans.fr</email>
              <idno type="idhal" notation="numeric">855202</idno>
              <idno type="halauthorid" notation="string">359827-855202</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Remi</forename>
                <surname>Dussart</surname>
              </persName>
              <email type="md5">8e2e4b2273fca85f5da16cacf243ae13</email>
              <email type="domain">univ-orleans.fr</email>
              <idno type="idhal" notation="string">remi-dussart</idno>
              <idno type="idhal" notation="numeric">4419</idno>
              <idno type="halauthorid" notation="string">7670-4419</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Corinne</forename>
                <forename type="middle">Y.</forename>
                <surname>Duluard</surname>
              </persName>
              <email type="md5">976c3b95ace96d6061e5182c05a6a9e0</email>
              <email type="domain">lspm.cnrs.fr</email>
              <idno type="idhal" notation="string">corinne-y-duluard</idno>
              <idno type="idhal" notation="numeric">748296</idno>
              <idno type="halauthorid" notation="string">370753-748296</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-1773-6551</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=BcLMvIkAAAAJ</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/JCN-4766-2023</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Philippe</forename>
                <surname>Lefaucheux</surname>
              </persName>
              <email type="md5">986977331ccf8193ea1fde7bfa62d638</email>
              <email type="domain">univ-orleans.fr</email>
              <idno type="idhal" notation="numeric">1248767</idno>
              <idno type="halauthorid" notation="string">167247-1248767</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-7889-8891</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Mohamed</forename>
                <surname>Boufnichel</surname>
              </persName>
              <idno type="halauthorid">167249-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Christophe</forename>
                <surname>Cardinaud</surname>
              </persName>
              <idno type="idhal" notation="numeric">759248</idno>
              <idno type="halauthorid" notation="string">256143-759248</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9753-8848</idno>
              <idno type="IDREF">https://www.idref.fr/060603011</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Pierre</forename>
                <surname>Ranson</surname>
              </persName>
              <idno type="halauthorid">132925-0</idno>
              <affiliation ref="#struct-955"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Remi</forename>
                <surname>Dussart</surname>
              </persName>
              <email type="md5">8e2e4b2273fca85f5da16cacf243ae13</email>
              <email type="domain">univ-orleans.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2010-01-06 14:45:36</date>
              <date type="whenModified">2025-04-04 18:29:56</date>
              <date type="whenReleased">2010-01-06 14:45:36</date>
              <date type="whenProduced">2009-02-25</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="133454">
                <persName>
                  <forename>Remi</forename>
                  <surname>Dussart</surname>
                </persName>
                <email type="md5">8e2e4b2273fca85f5da16cacf243ae13</email>
                <email type="domain">univ-orleans.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00444370</idno>
            <idno type="halUri">https://hal.science/hal-00444370</idno>
            <idno type="halBibtex">pereira:hal-00444370</idno>
            <idno type="halRefHtml">&lt;i&gt;Plasma Etch and Strip in Microelectronics 2nd International Workshop&lt;/i&gt;, Feb 2009, Louvain, Belgium</idno>
            <idno type="halRef">Plasma Etch and Strip in Microelectronics 2nd International Workshop, Feb 2009, Louvain, Belgium</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-NANTES">Université de Nantes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-ORLEANS">Université d'Orléans</idno>
            <idno type="stamp" n="IMN">Institut des matériaux Jean Rouxel</idno>
            <idno type="stamp" n="GREMI" corresp="UNIV-ORLEANS">Publications du GREMI</idno>
            <idno type="stamp" n="PCM" corresp="IMN">PCM</idno>
            <idno type="stamp" n="NANTES-UNIVERSITE">Nantes Université</idno>
            <idno type="stamp" n="UNIV-NANTES-AV2022">Université de Nantes</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="1">Not set</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="0">No</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">STiGer cryoetching process of silicon: passivation mechanisms, enhanced robustness and performances</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Jeremy</forename>
                    <surname>Pereira</surname>
                  </persName>
                  <email type="md5">11a8627971c547661ee16c22dfc4c321</email>
                  <email type="domain">univ-orleans.fr</email>
                  <idno type="idhal" notation="numeric">858541</idno>
                  <idno type="halauthorid" notation="string">381804-858541</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Hao</forename>
                    <surname>Jiang</surname>
                  </persName>
                  <email type="md5">cd597f47b7ad2106cd2532b63a6741f7</email>
                  <email type="domain">mines-paristech.fr</email>
                  <idno type="idhal" notation="string">iris-jianghao</idno>
                  <idno type="idhal" notation="numeric">20849</idno>
                  <idno type="halauthorid" notation="string">9877-20849</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Laurianne</forename>
                    <forename type="middle">E.</forename>
                    <surname>Pichon</surname>
                  </persName>
                  <email type="md5">4cdbdbf35d1239a7ecfe9c5afe30b95a</email>
                  <email type="domain">univ-orleans.fr</email>
                  <idno type="idhal" notation="numeric">855202</idno>
                  <idno type="halauthorid" notation="string">359827-855202</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Remi</forename>
                    <surname>Dussart</surname>
                  </persName>
                  <email type="md5">8e2e4b2273fca85f5da16cacf243ae13</email>
                  <email type="domain">univ-orleans.fr</email>
                  <idno type="idhal" notation="string">remi-dussart</idno>
                  <idno type="idhal" notation="numeric">4419</idno>
                  <idno type="halauthorid" notation="string">7670-4419</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Corinne</forename>
                    <forename type="middle">Y.</forename>
                    <surname>Duluard</surname>
                  </persName>
                  <email type="md5">976c3b95ace96d6061e5182c05a6a9e0</email>
                  <email type="domain">lspm.cnrs.fr</email>
                  <idno type="idhal" notation="string">corinne-y-duluard</idno>
                  <idno type="idhal" notation="numeric">748296</idno>
                  <idno type="halauthorid" notation="string">370753-748296</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-1773-6551</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=BcLMvIkAAAAJ</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/JCN-4766-2023</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Philippe</forename>
                    <surname>Lefaucheux</surname>
                  </persName>
                  <email type="md5">986977331ccf8193ea1fde7bfa62d638</email>
                  <email type="domain">univ-orleans.fr</email>
                  <idno type="idhal" notation="numeric">1248767</idno>
                  <idno type="halauthorid" notation="string">167247-1248767</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-7889-8891</idno>
                  <affiliation ref="#struct-955"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Mohamed</forename>
                    <surname>Boufnichel</surname>
                  </persName>
                  <idno type="halauthorid">167249-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Christophe</forename>
                    <surname>Cardinaud</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">759248</idno>
                  <idno type="halauthorid" notation="string">256143-759248</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9753-8848</idno>
                  <idno type="IDREF">https://www.idref.fr/060603011</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Pierre</forename>
                    <surname>Ranson</surname>
                  </persName>
                  <idno type="halauthorid">132925-0</idno>
                  <affiliation ref="#struct-955"/>
                </author>
              </analytic>
              <monogr>
                <meeting>
                  <title>Plasma Etch and Strip in Microelectronics 2nd International Workshop</title>
                  <date type="start">2009-02-25</date>
                  <date type="end">2009-02-27</date>
                  <settlement>Louvain</settlement>
                  <country key="BE">Belgium</country>
                </meeting>
                <imprint/>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="phys.phys.phys-plasm-ph">Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph]</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-955" status="OLD">
          <idno type="IdRef">195134257</idno>
          <idno type="RNSR">199612379C</idno>
          <orgName>Groupe de recherches sur l'énergétique des milieux ionisés</orgName>
          <orgName type="acronym">GREMI</orgName>
          <date type="start">1996-01-01</date>
          <date type="end">2011-12-31</date>
          <desc>
            <address>
              <addrLine>14 Rue d'Issoudun - BP 6744 45067 ORLEANS CEDEX 2</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-orleans.fr/gremi/</ref>
          </desc>
          <listRelation>
            <relation name="UMR 6606" active="#struct-300297" type="direct"/>
            <relation name="UMR6606" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-23639" status="VALID">
          <orgName>STMicroelectronics [Crolles]</orgName>
          <orgName type="acronym">ST-CROLLES</orgName>
          <desc>
            <address>
              <addrLine>850 rue Jean Monnet BP 16 38926 Crolles</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.st.com</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-896" status="OLD">
          <idno type="IdRef">148741657</idno>
          <idno type="ISNI">0000000403859937</idno>
          <idno type="RNSR">199612297N</idno>
          <idno type="ROR">https://ror.org/00cqpd580</idno>
          <orgName>Institut des Matériaux Jean Rouxel</orgName>
          <orgName type="acronym">IMN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Sciences 2 Rue de la Houssinière - BP 32229 44322 NANTES CEDEX 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs-imn.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-97058" type="direct"/>
            <relation active="#struct-93263" type="indirect"/>
            <relation active="#struct-300405" type="direct"/>
            <relation name="93263" active="#struct-93263" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR6502" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300297" status="VALID">
          <idno type="IdRef">026402971</idno>
          <idno type="ISNI">0000 0001 2158 1666</idno>
          <idno type="ROR">https://ror.org/014zrew76</idno>
          <orgName>Université d'Orléans</orgName>
          <orgName type="acronym">UO</orgName>
          <desc>
            <address>
              <addrLine>Château de la Source - Avenue du Parc Floral - BP 6749 - 45067 Orléans cedex 2</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-orleans.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-97058" status="OLD">
          <orgName>Université de Nantes - UFR des Sciences et des Techniques</orgName>
          <orgName type="acronym">UN UFR ST</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>2, rue de la Houssinière - BP 92208 - 44322 Nantes cedex 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.sciences-techniques.univ-nantes.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-93263" status="OLD">
          <idno type="IdRef">026403447</idno>
          <idno type="ROR">https://ror.org/03gnr7b55</idno>
          <orgName>Université de Nantes</orgName>
          <orgName type="acronym">UN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>1, quai de Tourville - BP 13522 - 44035 Nantes cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-nantes.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-300405" status="OLD">
          <idno type="IdRef">068449399</idno>
          <orgName>Ecole Polytechnique de l'Université de Nantes</orgName>
          <orgName type="acronym">EPUN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Chantrerie : Rue Christian Pauc - CS 50609 - 44306 Nantes Cedex 3Campus Gavy : Gavy Océanis -  CS 70152 - 44603 Saint-Nazaire CedexCampus Courtaisière : 18 Boulevard Gaston Defferre - 85035 La Roche-sur-Yon Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://web.polytech.univ-nantes.fr/l-ecole/</ref>
          </desc>
          <listRelation>
            <relation name="93263" active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>