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https://hal.science/hal-00444208
Submitted on : Wednesday, January 6, 2010-10:54:40 AM
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Corinne Y. Duluard, Remi Dussart, Laurianne E. Pichon, Philippe Lefaucheux, Michel Puech, et al.. A study on SF6/SiCl4 inductively coupled plasma by mass spectrometry and optical emission spectroscopy. 16th International Colloquium on Plasma Processes, Jun 2007, France. ⟨hal-00444208⟩
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