Direct observation of phase transitions during KrF laser processing investigated by time-resolved pyro/reflectometry' - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied Surface Science Année : 2009

Direct observation of phase transitions during KrF laser processing investigated by time-resolved pyro/reflectometry'

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hal-00442781 , version 1 (22-12-2009)

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Nadjib Semmar, M'Hand Tebib, Jiri Tesar, Nicolae Puscas, Amin-Chalhoub Elianne. Direct observation of phase transitions during KrF laser processing investigated by time-resolved pyro/reflectometry'. Applied Surface Science, 2009, 255 (10), pp.5549-5552. ⟨10.1016/j.apsusc.2008.08.084⟩. ⟨hal-00442781⟩
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