Amine functionalized SU-8 layer guiding Love mode surface acoustic wave - Archive ouverte HAL Access content directly
Journal Articles Sensors and Actuators B: Chemical Year : 2010

Amine functionalized SU-8 layer guiding Love mode surface acoustic wave

Abstract

The chemical functionalization of SU-8 photoresist with amine-ended silanes is demonstrated. The resulting active layer, coated on a quartz substrate, is used for propagating guided surface acoustic waves: its acoustic properties are used for the development of a chemical sensor for in situ analysis of aqueous solutions. The analytical principle is demonstrated by measuring with time resolution the binding of organometallic complexes of molar weight in the 250 g/mol range. The acoustic signal is interpreted as a pure mass effect, with a non-selective detection limit of the sensor of 60 ng/cm2.
Fichier principal
Vignette du fichier
SNB-D-08-01390_Manuscript.pdf (362.11 Ko) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

hal-00436712 , version 1 (09-04-2021)

Licence

Attribution

Identifiers

Cite

L. El Fissi, J.-M. Fried, F. Cherioux, S. Ballandras. Amine functionalized SU-8 layer guiding Love mode surface acoustic wave. Sensors and Actuators B: Chemical, 2010, 144, pp.23-26. ⟨10.1016/j.snb.2009.09.011⟩. ⟨hal-00436712⟩
65 View
66 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More