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Communication Dans Un Congrès Année : 2009

Determination of Young's Moduli for free-standing screen-printed thick film layers used in MEMS

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hal-00401505 , version 1 (03-07-2009)

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  • HAL Id : hal-00401505 , version 1

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Riadh Lakhmi, Hélène Debéda, Isabelle Dufour, Claude Lucat. Determination of Young's Moduli for free-standing screen-printed thick film layers used in MEMS. 20th workshop on micromachining, micro mechanics and micro systems, 2009, Toulouse, France. 4 p. ⟨hal-00401505⟩
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