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Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2008

Measured velocity distribution of sputtered Al atoms perpendicularly and parallel to the target

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hal-00397105 , version 1 (19-06-2009)

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  • HAL Id : hal-00397105 , version 1

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R. Ramos, G. Cunge, M. Touzeau, N. Sadeghi. Measured velocity distribution of sputtered Al atoms perpendicularly and parallel to the target. Journal of Physics D: Applied Physics, 2008, pp.41 (15), (2008), 152003. ⟨hal-00397105⟩
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