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Communication Dans Un Congrès Année : 2005

8-in. replication of sub-30 nm gaps by nanoimprint and mechanical characterization by AFM

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hal-00397005 , version 1 (19-06-2009)

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  • HAL Id : hal-00397005 , version 1

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J. Tallal, D. Peyrade, K. Berton, M. Gordon. 8-in. replication of sub-30 nm gaps by nanoimprint and mechanical characterization by AFM. 51 st EIPBN Electron, Ions, Photon Beam Technology and Nanofabrication, 2005, ORLANDO, United States. ⟨hal-00397005⟩
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