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Journal Articles European Physical Journal: Applied Physics Year : 2008

Thickness and substrate effects on AlN thin film growth at room temperature

E. Gautron
Pierre-Yves Jouan
  • Function : Author
Pierre-Yves Tessier
J. Brault
  • Function : Author
Y. Cordier

Dates and versions

hal-00396579 , version 1 (18-06-2009)

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B. Abdallah, C. Duquenne, Marie-Paule Besland, E. Gautron, Pierre-Yves Jouan, et al.. Thickness and substrate effects on AlN thin film growth at room temperature. European Physical Journal: Applied Physics, 2008, 43 (3), pp.309. ⟨10.1051/epjap:2008082⟩. ⟨hal-00396579⟩
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