In-depth Electrical Characterization of sub-45nm fully depleted strained SOI MOSFETs with TiN/HfO2 gate stack - Archive ouverte HAL
Article Dans Une Revue Solid-State Electronics Année : 2008

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hal-00391693 , version 1 (04-06-2009)

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Sylvain Feruglio, F. Andrieu, O. Faynot, G. Ghibaudo. In-depth Electrical Characterization of sub-45nm fully depleted strained SOI MOSFETs with TiN/HfO2 gate stack. Solid-State Electronics, 2008, 55, 489 (4), ⟨10.1016/j.sse.2007.10.039⟩. ⟨hal-00391693⟩
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