<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00384274</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-04-30T10:10:09+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Cleaning Aluminum Fluoride coatings from plasma reactor walls in SiCl4/Cl2 plasmas</title>
            <author role="aut">
              <persName>
                <forename type="first">R.</forename>
                <surname>Ramos</surname>
              </persName>
              <email type="md5">6952beb6393ab36e896e960ea5db8cc0</email>
              <email type="domain">cea.fr</email>
              <idno type="idhal" notation="string">raphramos</idno>
              <idno type="idhal" notation="numeric">854590</idno>
              <idno type="halauthorid" notation="string">317989-854590</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0627-6959</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">G.</forename>
                <surname>Cunge</surname>
              </persName>
              <idno type="halauthorid">400952-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">B.</forename>
                <surname>Pelissier</surname>
              </persName>
              <idno type="halauthorid">196294-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">O.</forename>
                <surname>Joubert</surname>
              </persName>
              <idno type="halauthorid">598567-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Marielle</forename>
                <surname>Clot</surname>
              </persName>
              <email type="md5">0b34f9a3638603b13afd163215bd2ff1</email>
              <email type="domain">cea.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2009-05-14 16:53:46</date>
              <date type="whenModified">2025-09-27 18:57:00</date>
              <date type="whenReleased">2009-05-14 16:53:46</date>
              <date type="whenProduced">2007</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="128943">
                <persName>
                  <forename>Marielle</forename>
                  <surname>Clot</surname>
                </persName>
                <email type="md5">0b34f9a3638603b13afd163215bd2ff1</email>
                <email type="domain">cea.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00384274</idno>
            <idno type="halUri">https://hal.science/hal-00384274</idno>
            <idno type="halBibtex">ramos:hal-00384274</idno>
            <idno type="halRefHtml">&lt;i&gt;Plasma Sources Science and Technology&lt;/i&gt;, 2007, pp.16, 711-715</idno>
            <idno type="halRef">Plasma Sources Science and Technology, 2007, pp.16, 711-715</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="CEA">CEA - Commissariat à l'énergie atomique</idno>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-GRENOBLE1">Université Joseph Fourier - Grenoble I</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="FMNT">FMNT - Fédération Micro- et Nano- Technologies</idno>
            <idno type="stamp" n="LTM" corresp="FMNT">Laboratoire des technologies de la microélectronique</idno>
            <idno type="stamp" n="PLASMA_ETCHING" corresp="LTM">Plasma etching</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Cleaning Aluminum Fluoride coatings from plasma reactor walls in SiCl4/Cl2 plasmas</title>
                <author role="aut">
                  <persName>
                    <forename type="first">R.</forename>
                    <surname>Ramos</surname>
                  </persName>
                  <email type="md5">6952beb6393ab36e896e960ea5db8cc0</email>
                  <email type="domain">cea.fr</email>
                  <idno type="idhal" notation="string">raphramos</idno>
                  <idno type="idhal" notation="numeric">854590</idno>
                  <idno type="halauthorid" notation="string">317989-854590</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0627-6959</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">G.</forename>
                    <surname>Cunge</surname>
                  </persName>
                  <idno type="halauthorid">400952-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">B.</forename>
                    <surname>Pelissier</surname>
                  </persName>
                  <idno type="halauthorid">196294-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">O.</forename>
                    <surname>Joubert</surname>
                  </persName>
                  <idno type="halauthorid">598567-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">18064</idno>
                <idno type="issn">0963-0252</idno>
                <idno type="eissn">1361-6595</idno>
                <title level="j">Plasma Sources Science and Technology</title>
                <imprint>
                  <publisher>IOP Publishing</publisher>
                  <biblScope unit="pp">16, 711-715</biblScope>
                  <date type="datePub">2007</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-616" status="OLD">
          <idno type="IdRef">184687586</idno>
          <idno type="ISNI">0000 0004 0382 8743</idno>
          <idno type="RNSR">200111811N</idno>
          <idno type="ROR">https://ror.org/036zswm25</idno>
          <orgName>Laboratoire des technologies de la microélectronique</orgName>
          <orgName type="acronym">LTM</orgName>
          <date type="start">1999-01-01</date>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://ltmlab.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-51016" type="direct"/>
            <relation active="#struct-300016" type="direct"/>
            <relation name="UMR5129 / EP2073" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-51016" status="OLD">
          <idno type="IdRef">026404796</idno>
          <idno type="ROR">https://ror.org/02aj0kh94</idno>
          <orgName>Université Joseph Fourier - Grenoble 1</orgName>
          <orgName type="acronym">UJF</orgName>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>BP 53 - 38041 Grenoble Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ujf-grenoble.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300016" status="VALID">
          <idno type="IdRef">026372061</idno>
          <idno type="ISNI">0000000122998025</idno>
          <idno type="ROR">https://ror.org/00jjx8s55</idno>
          <idno type="Wikidata">Q868550</idno>
          <orgName>Commissariat à l'énergie atomique et aux énergies alternatives</orgName>
          <orgName type="acronym">CEA</orgName>
          <desc>
            <address>
              <addrLine>Centre de SaclayCentre de GrenobleCentre de Cadaracheetc</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cea.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>