Optimizing pulsed OBIC technique for ESD defect localization
Résumé
This paper presents a study of the well-known Optical Beam Induced Current (OBIC) technique applied to ESD defect localisation. OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this study. We discuss especially on the influence of the laser energy, the bias of the device under and the spatial resolution of the technique
| Origine | Fichiers éditeurs autorisés sur une archive ouverte |
|---|
Loading...