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Article Dans Une Revue IEEE Transactions on Device and Materials Reliability Année : 2007

Optimizing pulsed OBIC technique for ESD defect localization

Résumé

This paper presents a study of the well-known Optical Beam Induced Current (OBIC) technique applied to ESD defect localisation. OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this study. We discuss especially on the influence of the laser energy, the bias of the device under and the spatial resolution of the technique

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Dates et versions

hal-00382949 , version 1 (11-05-2009)

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  • HAL Id : hal-00382949 , version 1

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Fabien Essely, Nicolas Guitard, Frédéric Darracq, Vincent Pouget, Marise Bafleur, et al.. Optimizing pulsed OBIC technique for ESD defect localization. IEEE Transactions on Device and Materials Reliability, 2007, 7 (4), pp.617-624. ⟨hal-00382949⟩
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