Erbium silicide formation under ultra high vacuum - Archive ouverte HAL
Conference Papers Year : 2007

Erbium silicide formation under ultra high vacuum

N. Breil
  • Function : Author
Emmanuel Dubois
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
CV
Y. Morand
  • Function : Author
V. Carron
  • Function : Author
A. Halimaoui
  • Function : Author
T. Skotnicki
  • Function : Author

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Engineering Sciences [physics]

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https://hal.science/hal-00367362

Submitted on : Wednesday, March 11, 2009-10:08:27 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00367362 , version 1 (11-03-2009)

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  • HAL Id : hal-00367362 , version 1

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N. Breil, Emmanuel Dubois, Y. Morand, V. Carron, A. Halimaoui, et al.. Erbium silicide formation under ultra high vacuum. Proceedings of the 16th European Workshop on Materials for Advanced Metallization, MAM 2007, 2007, Bruges, Belgium. ⟨hal-00367362⟩

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