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Communication Dans Un Congrès Année : 2007

Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

Résumé

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S eff , increases continuously from 5 mum to 10.5 mum. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).
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Dates et versions

hal-00362405 , version 1 (18-02-2009)

Identifiants

Citer

Mahmoud Al Ahmad, Christophe Loyez, Nathalie Rolland, Robert Plana, Paul-Alain Rolland. Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator. 37th European Microwave Conference, EuMC 2007, Oct 2007, Munich, Germany. pp.118-121, ⟨10.1109/EUMC.2007.4405140⟩. ⟨hal-00362405⟩
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