Although reliable models may predict the detection efficiency of semiconductor detectors, measurements are needed to check the parameters supplied by the manufacturers namely the thicknesses of dead layer, beryllium window and crystal active area. The efficiency of three silicon detectors has been precisely investigated in their entire photon energy range of detection. In the 0 to a few keV range, we have developed a new method based on the detection of the 2E1 decay of the metastable Ar17+ 2s -> 1s transition. Very good theoretical knowledge of the energetic distribution of the 2E1 decay mode enables precise characterization of the absorbing layers in front of the detectors. In the high-energy range (> 10 keV), the detector crystal thickness plays a major role in the detection efficiency and has been determined using a 241Am source.