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Journal Articles Microelectronic Engineering Year : 2008

Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

R.H. Liang
  • Function : Author
Caroline Soyer
N. Sama
X.L. Dong
  • Function : Author
G.S. Wang
  • Function : Author

Dates and versions

hal-00360094 , version 1 (10-02-2009)

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R.H. Liang, Denis Remiens, Caroline Soyer, N. Sama, X.L. Dong, et al.. Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization. Microelectronic Engineering, 2008, 85, pp.670-674. ⟨10.1016/j.mee.2007.12.031⟩. ⟨hal-00360094⟩
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