Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

R.H. Liang; Denis Remiens; Caroline Soyer; N. Sama; X.L. Dong; G.S. Wang

doi:10.1016/j.mee.2007.12.031

Journal Articles Microelectronic Engineering Year : 2008

Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

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R.H. Liang

Function : Author

Denis Remiens

Function : Author
PersonId : 751690
IdHAL : denis-remiens
ORCID : 0000-0002-6761-1442

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

Caroline Soyer

Function : Author
PersonId : 748061
IdHAL : caroline-soyer

N. Sama

Function : Author
PersonId : 760861
ORCID : 0000-0002-9761-4687

X.L. Dong

Function : Author

G.S. Wang

Function : Author

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Submitted on : Tuesday, February 10, 2009-11:41:26 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00360094 , version 1 (10-02-2009)

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HAL Id : hal-00360094 , version 1
DOI : 10.1016/j.mee.2007.12.031

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R.H. Liang, Denis Remiens, Caroline Soyer, N. Sama, X.L. Dong, et al.. Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization. Microelectronic Engineering, 2008, 85, pp.670-674. ⟨10.1016/j.mee.2007.12.031⟩. ⟨hal-00360094⟩

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Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

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