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Journal Articles Materials Science and Engineering: B Year : 2008

Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structure

A. Laszcz
  • Function : Author
J. Ratajczak
  • Function : Author
A. Czerwinski
  • Function : Author
J. Katcki
  • Function : Author
V. Srot
  • Function : Author
F. Phillipp
  • Function : Author
P.A. van Aken
  • Function : Author
N. Breil
  • Function : Author
G. Larrieu
  • Function : Author

Dates and versions

hal-00356977 , version 1 (29-01-2009)

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A. Laszcz, J. Ratajczak, A. Czerwinski, J. Katcki, V. Srot, et al.. Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structure. Materials Science and Engineering: B, 2008, 154-155, pp.175-178. ⟨10.1016/j.mseb.2008.10.002⟩. ⟨hal-00356977⟩
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