A TRL-like calibration for tunable interdigitated BST varactors - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue IEEE Transactions on Instrumentation and Measurement Année : 2008

A TRL-like calibration for tunable interdigitated BST varactors

Résumé

We report on a de-embedding technique for measuring the reflection coefficients of comblike capacitors patterned on barium-strontium-titanate (BST) ferroelectric films. The technique is derived from the thru-reflect-line calibration technique and is combined with conformal mapping to retrieve the complex permittivity of BST thin films. The accuracy of the method is demonstrated over a broad frequency for 0.3-mum-thick Ba x Sr 1-x TiO 3 , with x = 0.5, in a paraelectric state, grown by a sol-gel technique. The samples are characterized up to 35 GHz and exhibit a constant permittivity of 245 plusmn 12%, which is in good agreement with the values deduced from propagation wave constants of BST transmission lines
Fichier non déposé

Dates et versions

hal-00356922 , version 1 (29-01-2009)

Identifiants

Citer

Ludovic Burgnies, Gabriel Vélu, Gregory Houzet, Karine Blary, Jean-Claude Carru, et al.. A TRL-like calibration for tunable interdigitated BST varactors. IEEE Transactions on Instrumentation and Measurement, 2008, 57 (6), pp.1127-1132. ⟨10.1109/TIM.2007.915120⟩. ⟨hal-00356922⟩
25 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More