Performances and Potentialities of a very simple self-compensated pressure sensor demonstrator
Résumé
A pressure sensor demonstrator has been designed and mounted using a simple analog digital BICMOS converter and a capacitive Silicon Pyrex sensing cell. The measurements as function of pressure and temperature have enabeled to evaluate the efficiency of a ratiometric scheme to self compensate thermal drifts and non linearities. The best demonstrator is characterized by a thermal coefficent of offset smaller than 20ppm/K and a non linearity lower than or equal to +/81.2% FS. The essential features of the sensor have been modeled by a simple analytical expression. The model specifies the potential gains in pressure sensitivity and non linearity. The best design is based on a quasi symetrical architecture in which stray capacitors are minimized. This study demonstrates the feasibility of self compensated capacitive sensors characterized by overall accuracy in order of a few percents of measuremetns scale over a temperature range of 100K at very lowt cost.
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