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Journal Articles Materials Science Forum Year : 2002

Full Si wafer conversion into bulk 3C-SiC

A. Leycuras
  • Function : Author
O. Totterau
  • Function : Author
P. Vicente
  • Function : Author
L. Falkowsky
  • Function : Author

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Electronics
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hal-00324027 , version 1 (23-09-2008)

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A. Leycuras, O. Totterau, P. Vicente, L. Falkowsky, Pascal Girard, et al.. Full Si wafer conversion into bulk 3C-SiC. Materials Science Forum, 2002, 389-393, pp.147-150. ⟨10.4028/www.scientific.net/MSF.389-393.147⟩. ⟨hal-00324027⟩
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