Processing of porous silicon surface images for the estimation of pore size distribution
Résumé
This abstract presents a method of pore size distribution (PSD) estimation based on images processing (IP). We de-veloped it using porous silicon (PS) layers having different nanostructures. PS1 presents a porosity of 45 % and a specific area of 330 m²/g; PS2 presents porosity of 45 % and specific area of 223 m²/g. We characterized the PS lay-ers by and Barrett-Joyner-Halenda (BJH) theories applied to sorption data. With BJH theory, we found that the mean pore diameter of PS1 and PS2 are respectively 4.3 nm and 5.5 nm. We performed images of PS layers surface by high resolution scanning electronic microscopy (HRSEM), the processing of theses images leaded to the estima-tion of mean pore diameter, 4 nm and 5 nm respectively for PS1 and PS2, and the representation of pore distribu-tion. Mean pore diameter obtained is closed to the value obtained with BJH theory, showing the validity of our method. Advantages of images processing are exposed.