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Communication Dans Un Congrès Année : 2007

Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids

Résumé

This paper presents an original piezoresistive strain gauge architecture based on two polysilicon layers able to sense in-plane strain. These gauges are electrically isolated from the external environment in order to be used in liquids. The presented design is based on three optimization keypoints, which one of these allows the reduction of the beam width thus leading to an increased sensitivity in force. Design, modelling, fabrication and characterization have been investigated. An in-plane sensitivity of 30x10 -6 μN -1 has been obtained which is comparable to out of plane sensitivity, typically obtained with AFM cantilevers
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Dates et versions

hal-00284392 , version 1 (03-06-2008)

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Jean-Baptiste Bureau, Bernard Legrand, Dominique Collard, Lionel Buchaillot. Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩. ⟨hal-00284392⟩
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