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Communication Dans Un Congrès Année : 2008

STUDY OF FIRST-ORDER THERMAL SIGMA-DELTA ARCHITECTURE FOR CONVECTIVE ACCELEROMETERS

Résumé

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This “electro-physical” modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.

Domaines

Autre [cs.OH]
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Dates et versions

hal-00277687 , version 1 (07-05-2008)

Identifiants

Citer

Pascal Nouet, Frédérick Mailly, Laurent Latorre. STUDY OF FIRST-ORDER THERMAL SIGMA-DELTA ARCHITECTURE FOR CONVECTIVE ACCELEROMETERS. DTIP 2008, Apr 2008, Nice, France. pp.100-104. ⟨hal-00277687⟩
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