A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
Résumé
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4µm) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.
Domaines
Autre [cs.OH]Origine | Fichiers produits par l'(les) auteur(s) |
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