Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
Résumé
This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on “low cost” specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
Domaines
Autre [cs.OH]| Origine | Fichiers produits par l'(les) auteur(s) |
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