Article Dans Une Revue Applied Surface Science Année : 2002

Photo-lithography for 2{D} optical microstructures in porous silicon: application to nucleation of macropores

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hal-00272390 , version 1 (11-04-2008)

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S. Setzu, Patrick Ferrand, Gilles Lerondel, R. Romestain. Photo-lithography for 2{D} optical microstructures in porous silicon: application to nucleation of macropores. Applied Surface Science, 2002, 186 (1-4), pp.588-593. ⟨10.1016/S0169-4332(01)00692-4⟩. ⟨hal-00272390⟩

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