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Article Dans Une Revue Nanotechnology Année : 2003

Micromoulding of three-dimensional photonic crystals on silicon substrates

Résumé

The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.
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Dates et versions

hal-00272386 , version 1 (01-03-2016)

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Patrick Ferrand, M. J. Minty, M. Egen, J. Ahopelto, R. Zentel, et al.. Micromoulding of three-dimensional photonic crystals on silicon substrates. Nanotechnology, 2003, 14 (2), pp.323-326. ⟨10.1088/0957-4484/14/2/343⟩. ⟨hal-00272386⟩
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