A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2008

A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects

Alexia Missoffe
Jérôme Juillard

Résumé

Correct modelling of damping is essentiel to capture the dynamic behaviour of a NEMS device. Our interest is squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface. The lateral dimensions of the surfaces are large compared to the gap and the system is considered isothermal. Squeeze film damping is then governed by the Reynolds equation.
Fichier principal
Vignette du fichier
SFD_ROM_v3_2_.pdf (249.51 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-00270341 , version 1 (04-04-2008)
hal-00270341 , version 2 (21-01-2009)

Identifiants

Citer

Alexia Missoffe, Jérôme Juillard, Denis Aubry. A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects. Journal of Micromechanics and Microengineering, 2008, 18 (3), pp.035042. ⟨10.1088/0960-1317/18/3/035042⟩. ⟨hal-00270341v2⟩
186 Consultations
288 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More