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Article Dans Une Revue Electronics Letters Année : 2004

Low-loss InGaAsP/InP submicron optical waveguides fab ricated by ICP etching

Résumé

The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 µm. For the 0.5 µm width, the propagation losses at =1.55 µm as low as 4.2 dB/mm have been measured.
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hal-00270000 , version 1 (03-04-2008)

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Samuel Dupont, Arnaud Beaurain, Patrice Miska, Malek Zegaoui, Jean-Pierre Vilcot, et al.. Low-loss InGaAsP/InP submicron optical waveguides fab ricated by ICP etching. Electronics Letters, 2004, 40(14), pp.865-866. ⟨10.1049/el:20040502⟩. ⟨hal-00270000⟩
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