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Communication Dans Un Congrès Année : 2006

New technology for high throughput THz BioMEMS

Résumé

We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding
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Dates et versions

hal-00243997 , version 1 (07-02-2008)

Identifiants

Citer

Vianney Mille, Nour Eddine Bourzgui, Céline Vivien, Philippe Supiot, Bertrand Bocquet. New technology for high throughput THz BioMEMS. 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS'06, Aug 2006, New York, NY, United States. pp.3505-3508, ⟨10.1109/IEMBS.2006.260289⟩. ⟨hal-00243997⟩
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