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Article Dans Une Revue Materials Research Society Symposia Proceedings Année : 2007

characterization of nanocavities in silicon using small angle X-ray scattering

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hal-00204839 , version 1 (15-01-2008)

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  • HAL Id : hal-00204839 , version 1

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M. Dumont, V. Coulet, G. Regula, F. Bley. characterization of nanocavities in silicon using small angle X-ray scattering. Materials Research Society Symposia Proceedings, 2007, 884, pp.119-124. ⟨hal-00204839⟩

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