TCAD methodology for ESD robustness prediction of smart power ESD devices
Résumé
This work presents a new method to predict the ESD protection robustness of a device with TCAD simulations. Tested on different devices and two Smart Power technologies, the results are validated through electrical measurement and failure analysis. Failure current is always predicted with a good accuracy compared to technology spreading. In addition, the methodology provides a significant simulation time speedup compared to classical methods based on a temperature criterion.
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