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Communication Dans Un Congrès Année : 2006

ABOVE IC MICRO-POWER GENERATORS FOR RF-MEMS

S. Bancel
  • Fonction : Auteur
J.-P. Pereira-Ramos

Résumé

This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm² active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 µm² targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.
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Dates et versions

hal-00189314 , version 1 (20-11-2007)

Identifiants

Citer

S. Oukassi, R. Salot, S. Bancel, J.-P. Pereira-Ramos. ABOVE IC MICRO-POWER GENERATORS FOR RF-MEMS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 4 p. ⟨hal-00189314⟩

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