Influence of losses on microcantilever-based chemical sensors design
Résumé
The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of losses is provided to specify appropriate values of microcantilever aspect ratios (length-to-thickness, width-to-thickness). Conventional values of aspect ratios result in low quality factors, while those proposed here lead to slightly higher values of quality factor
Origine : Fichiers produits par l'(les) auteur(s)
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