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Article Dans Une Revue Microelectronic Engineering Année : 1995

A general methodology using an electron beam tester applied to failure localization inside a logic integrated circuit

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hal-00181885 , version 1 (24-10-2007)

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  • HAL Id : hal-00181885 , version 1

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François Marc, Hélène Fremont, Paul Jounet, M. Barre, Yves Danto. A general methodology using an electron beam tester applied to failure localization inside a logic integrated circuit. Microelectronic Engineering, 1995, 26, pp.181-193. ⟨hal-00181885⟩
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