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Communication Dans Un Congrès Année : 2005

Technological development of THz microfluidic microsystems for biological spectroscopy

Résumé

We investigate a possible fabrication of microfluidic MEMS dedicated to the THz spectroscopy in a mixing technology based on silicon substrate coated with a thick layer of polymer. This layer is useful for the microfluidic circulation and the electromagnetic propagation. We use an original deposition process realized by RPECVD (remote plasma enhanced vapor deposition), called also "cold plasma". We obtain layers up to 110 /spl mu/m without any cracks. We have measured the dielectric characteristics of this new type of polymer up to 220 GHz with a vectorial network analyzer and between 0.1 to 1.2 THz in the time domain with an electro-optic technique. This technology is now ready and allows realizing a mass production compatible with disposable bioMEMS.
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Dates et versions

hal-00162775 , version 1 (16-07-2007)

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Citer

Vianney Mille, Nour Eddine Bourzgui, F Medjdoub, L. Desplanque, Jean-Francois Lampin, et al.. Technological development of THz microfluidic microsystems for biological spectroscopy. Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, Sep 2004, Karlsruhe, Germany. pp.549-550, ⟨10.1109/ICIMW.2004.1422207⟩. ⟨hal-00162775⟩
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