<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00162711</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-03T05:14:15+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">"Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment"</title>
            <author role="aut">
              <persName>
                <forename type="first">Agnès</forename>
                <forename type="middle">A.</forename>
                <surname>Granier</surname>
              </persName>
              <idno type="halauthorid">218329-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">G.</forename>
                <surname>Borvon</surname>
              </persName>
              <idno type="halauthorid">218330-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>Bousquet</surname>
              </persName>
              <email type="md5">76e7636bcda8b5bd2cb014fc217fef23</email>
              <email type="domain">uca.fr</email>
              <idno type="idhal" notation="string">angeliquebousquet</idno>
              <idno type="idhal" notation="numeric">740351</idno>
              <idno type="halauthorid" notation="string">52003-740351</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8493-5468</idno>
              <idno type="IDREF">https://www.idref.fr/096417986</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Antoine</forename>
                <surname>Goullet</surname>
              </persName>
              <idno type="idhal" notation="numeric">759892</idno>
              <idno type="halauthorid" notation="string">318855-759892</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5411-4351</idno>
              <idno type="IDREF">https://www.idref.fr/077635167</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Leteinturier</surname>
              </persName>
              <idno type="halauthorid">218331-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>van Der Lee</surname>
              </persName>
              <email type="md5">997691d15fb6382bf1e55f60880b61c7</email>
              <email type="domain">umontpellier.fr</email>
              <idno type="idhal" notation="string">arie-van-der-lee</idno>
              <idno type="idhal" notation="numeric">746496</idno>
              <idno type="halauthorid" notation="string">147578-746496</idno>
              <idno type="IDREF">https://www.idref.fr/226110141</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-4567-1831</idno>
              <idno type="VIAF">https://viaf.org/viaf/512152636158520051419</idno>
              <affiliation ref="#struct-767"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Nathalie</forename>
                <surname>Bonneval</surname>
              </persName>
              <email type="md5">93d04e8c3b794d99e29e16f43893aeb5</email>
              <email type="domain">iemm.univ-montp2.fr.invalid</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2007-07-16 09:14:29</date>
              <date type="whenModified">2024-04-11 13:08:12</date>
              <date type="whenReleased">2007-07-16 09:14:29</date>
              <date type="whenProduced">2006</date>
              <ref type="externalLink" target="https://api.istex.fr/ark:/67375/WNG-H7GSRPFP-K/fulltext.pdf?sid=hal"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="103758">
                <persName>
                  <forename>Nathalie</forename>
                  <surname>Bonneval</surname>
                </persName>
                <email type="md5">93d04e8c3b794d99e29e16f43893aeb5</email>
                <email type="domain">iemm.univ-montp2.fr.invalid</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00162711</idno>
            <idno type="halUri">https://hal.science/hal-00162711</idno>
            <idno type="halBibtex">granier:hal-00162711</idno>
            <idno type="halRefHtml">&lt;i&gt;Plasma Processes and Polymers&lt;/i&gt;, 2006, 3, pp.365-373. &lt;a target="_blank" href="https://dx.doi.org/10.1002/ppap.200600022"&gt;&amp;#x27E8;10.1002/ppap.200600022&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Plasma Processes and Polymers, 2006, 3, pp.365-373. &amp;#x27E8;10.1002/ppap.200600022&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-NANTES">Université de Nantes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-MONTP2">Université Montpellier II - Sciences et Techniques du Languedoc</idno>
            <idno type="stamp" n="ENSC-MONTPELLIER">Ecole Nationale Supérieure de Chimie de Montpellier</idno>
            <idno type="stamp" n="IEM">Institut Européen des membranes</idno>
            <idno type="stamp" n="IMN">Institut des matériaux Jean Rouxel</idno>
            <idno type="stamp" n="PCM" corresp="IMN">PCM</idno>
            <idno type="stamp" n="CHIMIE">Chimie</idno>
            <idno type="stamp" n="UNIV-MONTPELLIER">Université de Montpellier</idno>
            <idno type="stamp" n="NANTES-UNIVERSITE">Nantes Université</idno>
            <idno type="stamp" n="UNIV-NANTES-AV2022">Université de Nantes</idno>
            <idno type="stamp" n="UM1-UM2" corresp="UNIV-MONTPELLIER">Université Montpellier 1 - Université Montpellier 2</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">"Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment"</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Agnès</forename>
                    <forename type="middle">A.</forename>
                    <surname>Granier</surname>
                  </persName>
                  <idno type="halauthorid">218329-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">G.</forename>
                    <surname>Borvon</surname>
                  </persName>
                  <idno type="halauthorid">218330-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>Bousquet</surname>
                  </persName>
                  <email type="md5">76e7636bcda8b5bd2cb014fc217fef23</email>
                  <email type="domain">uca.fr</email>
                  <idno type="idhal" notation="string">angeliquebousquet</idno>
                  <idno type="idhal" notation="numeric">740351</idno>
                  <idno type="halauthorid" notation="string">52003-740351</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8493-5468</idno>
                  <idno type="IDREF">https://www.idref.fr/096417986</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Antoine</forename>
                    <surname>Goullet</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">759892</idno>
                  <idno type="halauthorid" notation="string">318855-759892</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5411-4351</idno>
                  <idno type="IDREF">https://www.idref.fr/077635167</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Leteinturier</surname>
                  </persName>
                  <idno type="halauthorid">218331-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>van Der Lee</surname>
                  </persName>
                  <email type="md5">997691d15fb6382bf1e55f60880b61c7</email>
                  <email type="domain">umontpellier.fr</email>
                  <idno type="idhal" notation="string">arie-van-der-lee</idno>
                  <idno type="idhal" notation="numeric">746496</idno>
                  <idno type="halauthorid" notation="string">147578-746496</idno>
                  <idno type="IDREF">https://www.idref.fr/226110141</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-4567-1831</idno>
                  <idno type="VIAF">https://viaf.org/viaf/512152636158520051419</idno>
                  <affiliation ref="#struct-767"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">18062</idno>
                <idno type="issn">1612-8850</idno>
                <idno type="eissn">1612-8869</idno>
                <title level="j">Plasma Processes and Polymers</title>
                <imprint>
                  <publisher>Wiley-VCH Verlag</publisher>
                  <biblScope unit="volume">3</biblScope>
                  <biblScope unit="pp">365-373</biblScope>
                  <date type="datePub">2006</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1002/ppap.200600022</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="chim">Chemical Sciences</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Thin ppHMDSO plasma polymer films deposited in a low pressure hexamethyldisiloxane plasma have been exposed to oxygen plasmas ignited in the same reactor at different pressures. The time evolution of the ppHMDSO film during the oxygen plasma treatment (30 s to one hour) was monitored in situ bymulti-wavelength ellipsometry. The treated films were analysed ex situ by X-ray reflectometry, spectroscopic ellipsometry and infrared spectroscopy. On the other hand, the oxygen atom density aswell as the oxygen ion density and energy weremeasured by actinometry and Langmuir probe measurements, respectively. For all the investigated oxygen plasma conditions, the film thickness and extinction coefficient significantly decrease. If the O2þ ion energy is low enough (typically less than 10 eV) the 65nm ppHMDSO can even be transformed into a 45 nm-thick carbon free SiO2-like film. In contrast, if the ion energy is higher than 10 eV, the ppHMDSOis only partially oxidised. Based on the oxygen atom flux measurement, it is concluded that the number of oxygen atoms impinging on the ppHMDSO film is not the only parameter which governs the treatment. The oxygen ion energy appears to have a key role as far as energetic ions are likely to induce the formation of a dense superficial SiO2 layer which prevents the diffusion of O atoms in the film and the out diffusion of volatile oxidation products.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-896" status="OLD">
          <idno type="IdRef">148741657</idno>
          <idno type="ISNI">0000000403859937</idno>
          <idno type="RNSR">199612297N</idno>
          <idno type="ROR">https://ror.org/00cqpd580</idno>
          <orgName>Institut des Matériaux Jean Rouxel</orgName>
          <orgName type="acronym">IMN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Sciences 2 Rue de la Houssinière - BP 32229 44322 NANTES CEDEX 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs-imn.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-97058" type="direct"/>
            <relation active="#struct-93263" type="indirect"/>
            <relation active="#struct-300405" type="direct"/>
            <relation name="93263" active="#struct-93263" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR6502" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-767" status="OLD">
          <idno type="ISNI">0000000417572291</idno>
          <idno type="RNSR">199412064U</idno>
          <idno type="ROR">https://ror.org/05rtchs68</idno>
          <orgName>Institut Européen des membranes</orgName>
          <orgName type="acronym">IEM</orgName>
          <date type="start">1995-01-01</date>
          <date type="end">2014-12-31</date>
          <desc>
            <address>
              <addrLine>1919, route de Mende - BP 5051 - 34293 Montpellier cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.iemm.univ-montp2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92690" type="direct"/>
            <relation active="#struct-300370" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5635" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-97058" status="OLD">
          <orgName>Université de Nantes - UFR des Sciences et des Techniques</orgName>
          <orgName type="acronym">UN UFR ST</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>2, rue de la Houssinière - BP 92208 - 44322 Nantes cedex 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.sciences-techniques.univ-nantes.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-93263" status="OLD">
          <idno type="IdRef">026403447</idno>
          <idno type="ROR">https://ror.org/03gnr7b55</idno>
          <orgName>Université de Nantes</orgName>
          <orgName type="acronym">UN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>1, quai de Tourville - BP 13522 - 44035 Nantes cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-nantes.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-300405" status="OLD">
          <idno type="IdRef">068449399</idno>
          <orgName>Ecole Polytechnique de l'Université de Nantes</orgName>
          <orgName type="acronym">EPUN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Chantrerie : Rue Christian Pauc - CS 50609 - 44306 Nantes Cedex 3Campus Gavy : Gavy Océanis -  CS 70152 - 44603 Saint-Nazaire CedexCampus Courtaisière : 18 Boulevard Gaston Defferre - 85035 La Roche-sur-Yon Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://web.polytech.univ-nantes.fr/l-ecole/</ref>
          </desc>
          <listRelation>
            <relation name="93263" active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-92690" status="OLD">
          <orgName>Université Montpellier 2 - Sciences et Techniques</orgName>
          <orgName type="acronym">UM2</orgName>
          <date type="end">2014-12-31</date>
          <desc>
            <address>
              <addrLine>Place Eugène Bataillon - 34095 Montpellier cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-montp2.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300370" status="OLD">
          <idno type="ROR">https://ror.org/03sgyqj04</idno>
          <orgName>Ecole Nationale Supérieure de Chimie de Montpellier</orgName>
          <orgName type="acronym">ENSCM</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>8 Rue de l'Ecole Normale 34296 Montpellier Cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.enscm.fr</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>