Optimized aspect ratios for high quality factor microcantilevers in air - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2007

Optimized aspect ratios for high quality factor microcantilevers in air

Résumé

A theoretical study which take into account several losses (viscous losses, support losses, acoustic radiation, thermoelastic losses) has already shown that it is possible to perform a quality factor optimization by adjusting the aspect ratios of a microcantilever1. The presence of an optimum quality factor is verified experimentaly.
Fichier non déposé

Dates et versions

hal-00160480 , version 1 (06-11-2007)

Identifiants

  • HAL Id : hal-00160480 , version 1

Citer

Frédéric Lochon, Naser Belmiloud, Isabelle Dufour, Dominique Rebière. Optimized aspect ratios for high quality factor microcantilevers in air. International Workshop on Nanomechanical Sensors, 2007, Montréal, Canada. pp. 40. ⟨hal-00160480⟩
46 Consultations
0 Téléchargements

Partager

Gmail Facebook X LinkedIn More