Kinetics of oxydation by scanning probe microscopy : a space-charge-limited model - Archive ouverte HAL
Article Dans Une Revue Journal of Applied Physics Année : 2000

Kinetics of oxydation by scanning probe microscopy : a space-charge-limited model

Résumé

This article proposes an enhanced oxidation model for scanning probe microscope (SPM) nanolithography that reproduces the power-of-time law reported for tip-induced anodic oxidation. It is shown that the space charge resulting from nonstoichiometric states strongly limits the oxidation rate. The direct relationship between the oxide thickness and time is provided by integration of the oxide rate equation. Measurements on SPM-induced oxides generated on a titanium surface are compared to theory. The predominant role of the space charge is corroborated by electrical measurements on oxide barriers that exhibit current fluctuations due to Coulombic effects.
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Dates et versions

hal-00158510 , version 1 (20-09-2024)

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Emmanuel Dubois, J.L. Bubendorff. Kinetics of oxydation by scanning probe microscopy : a space-charge-limited model. Journal of Applied Physics, 2000, 87, pp.8148-8154. ⟨10.1063/1.373510⟩. ⟨hal-00158510⟩
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